Synthesis of hafnium nanoparticles and hafnium nanoparticle films by gas condensation and energetic deposition
نویسندگان
چکیده
منابع مشابه
Hafnium Nitrate Precursor Synthesis and HfO2 Thin Film Deposition
The paper will introduce a simple new method on the synthesis of both hafnium and zirconium nitrate precursors. The intermediate product, dinitrogen pentoxide produced from the water extraction from fume nitric acid via phosphorus pentoxide, was condensed by liquid nitrogen trap into a flask equipped with hafnium or zirconium tetrachloride. To give the high yield, the mixture of fume nitric aci...
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Owing to their prominent stability and CMOS compatibility, HfO2-based ferroelectric films have attracted great attention as promising candidates for ferroelectric random-access memory applications. A major reliability issue for HfO2 based ferroelectric devices is fatigue. So far, there have been a few studies on the fatigue mechanism of this material. Here, we report a systematic study of the f...
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In his paper, Chandi C. Dey reports on the measurement of the nuclear quadrupole interaction of 181Hf(β−)181Ta in α-Hf metal with a few percent zirconium heated in air by perturbed angular correlation (PAC) of γ-rays. Since he did not observe the formation of HfO2 up to 773 K and during initial heating at 873 K for one day, he concluded that no oxygen is absorbed. The time dependent hyperfine i...
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Time-differential perturbed angular correlation (TDPAC) studies in hafnium metal (∼ 5%Zr) have been carried out at different temperatures. It is found that hafnium metal on heating at 873 K continuously for two days in air, transforms partially and abruptly to HfO2 while no component of oxide has been observed for heating up to 773 K and during initial heating at 873 K for 1 day. This result is...
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Highly uniform, smooth, and conformal coatings of higher nitrides of hafnium and zirconium were produced by atomic layer deposition from homoleptic tetrakis(dialkylamido)metal(IV) complexes and ammonia at low substrate temperatures (150-250 °C). The precursor vapors were alternately pulsed into a heated reactor, yielding 1.15-1.20 Å of metal nitride film for every cycle. Successful depositions ...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2018
ISSN: 2190-4286
DOI: 10.3762/bjnano.9.179